@article{oai:omu.repo.nii.ac.jp:00000365,
 author = {Ashida, Kohei and Okano, Makoto and Ohtsuka, Minoru and Seki, Miyoshi and Yokoyama, Nobuyuki and Koshino, Keiji and Mori, Masahiko and Asano, Takashi and Noda, Susumu and Takahashi, Yasushi},
 issue = {15},
 journal = {Optics Express},
 month = {Jul},
 note = {application/pdf, Article, Optics Express. 2017, 25 (15), p.18165-18174},
 pages = {18165--18174},
 title = {Ultrahigh-Q photonic crystal nanocavities fabricated by CMOS process technologies},
 volume = {25},
 year = {2017}
}